«¬    ¸¹

      VO-20

      VO-25

      VO-30

      VO-40

 ¤º³¡¤Ø¤o(WxHxD)  

 200x200x250 mm

 250x250x300 mm

 300x300x350 mm

 400x400x450 mm

 ¥~³¡¤Ø¤o(WxHxD)

 500x380x375 mm

 550x430x425 mm

 610x480x475 mm

 710x598x575 mm

     ·Å«×½d³ò

                               40¢J¡ã200¢J

    ¯uªÅ«×½d³ò

                               760¡ã1 Torr

     ·Å«×ºë«×

                             ¡Ó1% (¦b200¢J)

     ·Å«×¤À¥¬

                                  ¡Ó2%

   ·Å«×±±¨î¤è¦¡

                             PID+SSR+KTYPE

   ·Å«×Åã¥Ü¤è¦¡

                                 IJºN¦¡

     ®É¶¡±±¨î

                             LED¼Æ¦rÅã¥Ü

 ³Ì°ª·Å«×¨ì¹F®É¶¡  

                                ¬ù50¤ÀÄÁ

     ¤º³¡§÷½è

                            ¥þ¤£ù׿ûSUS304#

     ¥~³¡§÷½è

                              ÆQ¤Æ¿ûªO¯Nº£

     ¯M ½c ªù

                              ¨ã³zµø¬Á¼þªù

     ¬]    ªO   

                              ¥i©â¦¡¬]ªO¤G¤ù

     ¯u ªÅ ­p

                              ±Ä¥Î¤½¨î¯uªÅ­p

     ¹q    ·½

                              110V or 220V

     ¥Ë ¯S ¼Æ

      600W

      800W

     1000W

     2000W